Glass, a critical material for semiconductor packaging (e.g., TGV substrates with thicknesses 50–500μm), demands ultra-precision cutting to meet strict edge quality standards. Traditional mechanical cutting often causes chipping, microcracks, and residual stress, requiring time-consuming post-polishing and increasing production costs. Conventional long-pulse lasers, meanwhile, generate noticeable heat-affected zones (HAZ), degrading via accuracy and long-term reliability.

Edge roughness Ra ≤ 0.1μm
Chipping width < 5μm
Zero HAZ, eliminating post-processing grinding
Non-contact processing avoids material damage
Sub-micron precision meets semiconductor-grade requirements
Reduces production cycles by 60% vs. traditional me
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